Parameters ye kɛ̈n:
Proyek | Description |
Resolution SE | 3.0nm (30kV), High vacuum mode / 10nm (3kV), high vacuum mode |
Resolution BSE | 4.0nm (30kV), Low vacuum mode |
Wurtin | x5 ~ x300,000 |
Voltage acceleration | 0.3 ~ 30 kV |
Low vacuum range | 6 ~ 270 Pa |
Maksimum Sample Size | Dɛmɛtɛr 200mm |
Sample Table | Tipe I Tipe II |
X | 0 ~ 80mm 0 ~ 100mm |
Y | 0 ~ 40mm 0 ~ 50mm |
Z | 5 ~ 35mm 5 ~ 65mm |
R | 360o 360o |
T | -20o~ +90o -20o ~ +90o |
T | -20o~ +90o -20o ~ +90o |
Sample height | 35mm (WD=10mm) 80mm (WD=10mm) |
Driver jili | Manual 5-axis motor drive |
Lampu | Prepair Tungsten Lamp Wire |
Lens Light Bar | 4-hole lens light bar ye lëu bɛ̈n looi |
Gun Pressure | Fixed proportional bias, manual bias, and automatic 4 bias |
Detektor | Dual Electronic Detector High Sensitivity Semiconductor Back Dispersion Electronic Detector |
Analyze lokasi | WD=10mm, TOA=35o |
Kontrol | Mouse, keyboard, manual knob |
Ajuiɛɛr otomatik | Auto filament saturation, auto 4 partial pressure, auto gun pairing middle, auto beam flow setting, auto fusion shaft, auto focus dissipation, auto brightness contrast |
Bayan Detail
1. S-3400N tɔ̈u në awtomatik luɔɔi, nɔŋgɔn de awtomatik filament saturation, 4 partial pressure, awtomatik gun pair medium, awtomatik beam setup,
Automatic coupling shaft automatic focus and dissipation, automatic brightness contrast, etc. Automatic coupling shaft automatic focus and dissipation, automatic brightness contrast, etc. Automatic coupling shaft automatic focus and dissipation, automatic brightness contrast, etc.
2. A tɛ̈n yenë 10nm ye gam në 3kV low acceleration voltage.
3. New 5-segment high sensitivity semiconductor type back dispersion probe.
4. S-3400N II ye tɔ̈u në 5-axis motor table, ye tɔ̈u në -20 degrees ~ + 90 degrees, ye tɔ̈u në 80mm.
5. Yïn alëu ba EDX, WDX ku EBSD tɔ̈ɔ̈u në kaam tök.
6. Vacuum system ye turbomolecule pump luɔ̈ɔ̈i